Research of boron films deposited on different substrates

Jie Zhou; Linjun Wang; Jian Huang; Ke Tang; Bing Ren; Beiling Yao; Yiben Xia

doi:10.1117/12.2033053

19 September 2013 Research of boron films deposited on different substrates

Jie Zhou, Linjun Wang, Jian Huang, Ke Tang, Bing Ren, Beiling Yao, Yiben Xia

Proceedings Volume 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications; 89050Q (2013) https://doi.org/10.1117/12.2033053
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

Semiconductor detector that incorporate neutron reactive material within the same detector demonstrates a new method for neutron dosimetry and boron neutron reactive therapy seems to be a promising treatment. Boron films were deposited on single crystalline silicon, glass, and CVD diamond film by magnetron sputtering, close-space sublimation and vacuum evaporation. The properties of the samples were characterized by SEM, which shows vacuum evaporation method is suitable for depositing high quality boron films.

Citation Download Citation

Jie Zhou, Linjun Wang, Jian Huang, Ke Tang, Bing Ren, Beiling Yao, and Yiben Xia "Research of boron films deposited on different substrates", Proc. SPIE 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 89050Q (19 September 2013); https://doi.org/10.1117/12.2033053

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