Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors

Taro Hitosugi; D. Packwood; S. Shiraki

doi:10.1117/12.2045551

8 March 2014 Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors

Taro Hitosugi, D. Packwood, S. Shiraki

Proceedings Volume 8987, Oxide-based Materials and Devices V; 89870U (2014) https://doi.org/10.1117/12.2045551
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li₄Ti₅O₁₂ and LiTi₂O₄, on MgAl₂O₄ (111) substrates are investigated. Although a Li₄Ti₅O₁₂ target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ~0.5, enabling high quality LiTi₂O₄ films to be prepared with a rocking curve full-width at half-maximum of ~0.05°. The LiTi₂O₄ epitaxial thin films exhibited high conductivity at room temperature (~3.0 × 10³ Ω⁻¹cm⁻¹) and a superconducting transition temperature of ~13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

Citation Download Citation

Taro Hitosugi, D. Packwood, and S. Shiraki "Atomic collision effects during PLD processes: nonstoichiometry control in transparent superconductors", Proc. SPIE 8987, Oxide-based Materials and Devices V, 89870U (8 March 2014); https://doi.org/10.1117/12.2045551

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