Study of the instrument transfer function of  a free-form optics metrology system: SCOTS

Tianquan Su; Alejandro Maldonado; Peng Su; Ping Zhou; James H. Burge

doi:10.1117/12.2037040

19 December 2013 Study of the instrument transfer function of a free-form optics metrology system: SCOTS

Tianquan Su, Alejandro Maldonado, Peng Su, Ping Zhou, James H. Burge

Proceedings Volume 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 904602 (2013) https://doi.org/10.1117/12.2037040
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

ITF is usually over looked during the deflectometry measurements, especially when low spatial frequency errors are the main test focus. However, real data shows that the effect of ITF cannot be ignored to reach high accuracy measurements of high spatial frequency features. We illustrated with simulation that ITF of SCOTS is proportional to the camera imaging MTF. We then applied this result to the edge measurement data of a large mirror, where a better agreement is achieved between SCOTS test and a test-plate interferometric test after the compensation. Experimental verification of the ITF theory for deflectometry is preliminary performed. The results will be summarized in our following paper.

Citation Download Citation

Tianquan Su, Alejandro Maldonado, Peng Su, Ping Zhou, and James H. Burge "Study of the instrument transfer function of a free-form optics metrology system: SCOTS", Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 904602 (19 December 2013); https://doi.org/10.1117/12.2037040

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