Miniature Fabry-Perot sensor with polymer dual optical cavities for simultaneous pressure and temperature measurements

Hyungdae Bae; Miao Yu

doi:10.1117/12.2053568

5 June 2014 Miniature Fabry-Perot sensor with polymer dual optical cavities for simultaneous pressure and temperature measurements

Hyungdae Bae, Miao Yu

Author Affiliations +

Proceedings Volume 9112, Sensing Technologies for Global Health, Military Medicine, and Environmental Monitoring IV; 911218 (2014) https://doi.org/10.1117/12.2053568
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

A novel miniature dual cavity Fabry–Perot sensor is presented for simultaneous measurements of pressure and temperature in this work. Both of the pressure and the temperature sensing cavities are fabricated by using a single step UV molding process which is simple, cost-effective, and safe procedure. The pressure sensor is composed of an UV molded cavity covered by a metal/polymer composite diaphragm for a high pressure sensitivity with a miniature sensor size. The temperature sensor is made of a short segment of UV curable polymer, which renders a high temperature sensitivity due to the material’s large thermal expansion. By exploiting the material characteristic of the polymer around 90% of size-reduction could be achieved with 88.5% of temperature sensitivity of the previously reported sensor made of pure silica. The overall sensor size is around 150 μm in diameter and 55 μm in length. Experimental studies show that the sensor has a good linearity over a pressure range of 1.0 to 4.0 psi with a pressure sensitivity of 0.137 μm/psi at 28 °C, and a temperature range of 28.0 °C to 42.4 °C with a temperature sensitivity of 0.0026 μm/◦C. The sensor can be applied to many biomedical applications that require pressure and temperature simultaneous measurements with minimum intrusiveness.

Citation Download Citation

Hyungdae Bae and Miao Yu "Miniature Fabry-Perot sensor with polymer dual optical cavities for simultaneous pressure and temperature measurements", Proc. SPIE 9112, Sensing Technologies for Global Health, Military Medicine, and Environmental Monitoring IV, 911218 (5 June 2014); https://doi.org/10.1117/12.2053568

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