Optical characterization of ferroelectric PZT thin films by variable angle spectroscopic ellipsometry

Md. Shafiqur Rahman; Carlos D. Garcia; Amar Bhalla; Ruyan Guo

doi:10.1117/12.2064658

5 September 2014 Optical characterization of ferroelectric PZT thin films by variable angle spectroscopic ellipsometry

Md. Shafiqur Rahman, Carlos D. Garcia, Amar Bhalla, Ruyan Guo

Proceedings Volume 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII; 92000A (2014) https://doi.org/10.1117/12.2064658
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Ferroelectric thin films are used as high dielectric constant capacitors, infrared detectors, piezoelectric transducers, optical modulators, optical waveguides, and nonvolatile memory chips for dynamic random access memory (DRAM) etc. While ferroelectric and dielectric properties of these films have been extensively investigated, their optical properties have been comparatively less studied and of limited use in quantitative evaluation of multilayer thin films. In this work we explored the variable angle spectroscopic ellipsometry (VASE) technique for its effectiveness in physical property characterization. The VASE combined with its computer modeling tool enables nondestructive, nonintrusive, and contactless optical means for optical characterization. Crystalline Lead Zirconium Titanate PbZr_0.52Ti_0.48O₃ (PZT) thin films, fabricated on SrTiO₃ layer atop of Si substrates, were characterized using VASE (J.A. Woollam; Lincoln, NE, USA) by determining the ellipsometric parameters Ψ and Δ as a function of wavelengths (200-1000 nm) and incident angles (65°, 70°,75°) at room temperature. A physical representation of the multilayer system was constructed by a six layer model (analysis software WVASE32, J.A. Woollam) through a step-by-step method. Other physical properties characterized by several well-known techniques on structure, morphology and topographical features correspond well with the models developed using VASE alone. The technique and the methodology developed have shown promises in identifying the respective thickness and optical properties of multilayer thin film system, with limited input of processing or composition information.

Citation Download Citation

Md. Shafiqur Rahman, Carlos D. Garcia, Amar Bhalla, and Ruyan Guo "Optical characterization of ferroelectric PZT thin films by variable angle spectroscopic ellipsometry", Proc. SPIE 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII, 92000A (5 September 2014); https://doi.org/10.1117/12.2064658

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Ferroelectric materials

Thin films

Refractive index

Crystals

Dielectrics

Silicon

Spectroscopic ellipsometry

Show All Keywords

Keywords/Phrases

Search In:

Publication Years