High divergent 2D grating

Jin Wang; Jianyong Ma; Changhe Zhou

doi:10.1117/12.2071324

11 November 2014 High divergent 2D grating

Jin Wang, Jianyong Ma, Changhe Zhou

Proceedings Volume 9271, Holography, Diffractive Optics, and Applications VI; 92711E (2014) https://doi.org/10.1117/12.2071324
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

A 3×3 high divergent 2D-grating with period of 3.842μm at wavelength of 850nm under normal incidence is designed and fabricated in this paper. This high divergent 2D-grating is designed by the vector theory. The Rigorous Coupled Wave Analysis (RCWA) in association with the simulated annealing (SA) is adopted to calculate and optimize this 2D-grating.The properties of this grating are also investigated by the RCWA. The diffraction angles are more than 10 degrees in the whole wavelength band, which are bigger than the traditional 2D-grating. In addition, the small period of grating increases the difficulties of fabrication. So we fabricate the 2D-gratings by direct laser writing (DLW) instead of traditional manufacturing method. Then the method of ICP etching is used to obtain the high divergent 2D-grating.

Citation Download Citation

Jin Wang, Jianyong Ma, and Changhe Zhou "High divergent 2D grating", Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 92711E (11 November 2014); https://doi.org/10.1117/12.2071324

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