Diffractive optical elements: fabrication and application

A. G. Poleshchuk; V. P. Korolkov; R. K. Nasyrov

doi:10.1117/12.2073301

21 August 2014 Diffractive optical elements: fabrication and application

A. G. Poleshchuk, V. P. Korolkov, R. K. Nasyrov

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 928302 (2014) https://doi.org/10.1117/12.2073301
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

We review our recent progress on development of the methods for fabrication of precision binary and as well as highefficiency continuous-relief diffractive optical elements (DOEs) by combining complementary advantages of circular laser writing system (CLWS), direct laser beam writing in thermal and photo-sensitive materials and analog lithography. The main limitation and tolerances of writing methods are identified, and their influence on optical performance of DOEs is investigated. The latest results of fabrication and practical applications of DOEs with more than 200 mm diameter and a minimum feature size of 0.5 micrometer for testing large aspheric surfaces with a Fizeau-type interferometer are presented.

Citation Download Citation

A. G. Poleshchuk, V. P. Korolkov, and R. K. Nasyrov "Diffractive optical elements: fabrication and application", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928302 (21 August 2014); https://doi.org/10.1117/12.2073301

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