A light-activated optopiezoelectric thin-film actuator for microfluidic applications

Hsin-Hu Wang; Ting-Jui Wu; Cheng-Che Hsu; Chih-Kung Lee; Yu-Hsiang Hsu

doi:10.1117/12.2079873

5 March 2015 A light-activated optopiezoelectric thin-film actuator for microfluidic applications

Hsin-Hu Wang, Ting-Jui Wu, Cheng-Che Hsu, Chih-Kung Lee, Yu-Hsiang Hsu

Proceedings Volume 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII; 93200D (2015) https://doi.org/10.1117/12.2079873
Event: SPIE BiOS, 2015, San Francisco, California, United States

Abstract

In this paper, we present a new type of piezoelectric composite material, optopiezoelectric thin-film, to serve as a lightactivated micropump for integrating with a microfluidic device. By using a photoconductive material (titanium oxide phthalocyanine) to serve as one of the electrodes of a piezoelectric polyvinylidene fluoride (PVDF) polymer, multiple locations of this optopiezoelectric thin-film can be actuated independently with one driving voltage source and a programmable light mask. Integrating this optopiezoelectric thin-film to a microfluidic device, complex operations of a multi-functioned microfluidic device can potentially be simplified and scaled up. Here, we present our preliminary result to demonstrate the feasibility of using one optopiezoelectric thin-film to serve as two microfluidic micropumps controlled by a light mask.

Citation Download Citation

Hsin-Hu Wang, Ting-Jui Wu, Cheng-Che Hsu, Chih-Kung Lee, and Yu-Hsiang Hsu "A light-activated optopiezoelectric thin-film actuator for microfluidic applications", Proc. SPIE 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII, 93200D (5 March 2015); https://doi.org/10.1117/12.2079873

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