Thin film deposition and LIDT testing at ISI Brno

Jindrich Oulehla; Josef Lazar

doi:10.1117/12.2176181

7 January 2015 Thin film deposition and LIDT testing at ISI Brno

Jindrich Oulehla, Josef Lazar

Author Affiliations +

Proceedings Volume 9442, Optics and Measurement Conference 2014; 94420Y (2015) https://doi.org/10.1117/12.2176181
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

In this contribution we present a technology for thin film optical coating deposition and laser induced damage threshold (LIDT) testing of coatings available at the Institute of Scientific Instruments. We use our e-beam evaporation coating system equipped with plasma ion assisted deposition to produce various optical coatings and a LIDT test station to test them. The station allows for testing at room temperature as well as cryogenic conditions.

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Jindrich Oulehla and Josef Lazar "Thin film deposition and LIDT testing at ISI Brno", Proc. SPIE 9442, Optics and Measurement Conference 2014, 94420Y (7 January 2015); https://doi.org/10.1117/12.2176181

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