Design and development of measuring device for beam pointing and positional errors in multi-axes laser interferometric systems

Pengcheng Hu; Yifei Zhang; Ting Wu; Guibin Yuan

doi:10.1117/12.2181146

6 March 2015 Design and development of measuring device for beam pointing and positional errors in multi-axes laser interferometric systems

Pengcheng Hu, Yifei Zhang, Ting Wu, Guibin Yuan

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94462G (2015) https://doi.org/10.1117/12.2181146
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

The mechanism of Abbe error and cosine error resulting from beam pointing and positional errors in a laser interference measurement system was analyzed, a PSD-based measurement method was proposed to measure both errors simultaneously. A light intensity adaptive measuring device was designed for measurement of pointing and positional errors. Experimental results indicated that the measuring range and resolution of the position deviation could reach ±4.5mm and 1μm respectively; the angular range and resolution could reach ±0.112rad and 25μrad.

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Pengcheng Hu, Yifei Zhang, Ting Wu, and Guibin Yuan "Design and development of measuring device for beam pointing and positional errors in multi-axes laser interferometric systems", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94462G (6 March 2015); https://doi.org/10.1117/12.2181146

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