Two-dimensional thickness measurement using acousto-optically tuned external cavity laser diode

Takamasa Suzuki; Shingo Abe; Samuel Choi

doi:10.1117/12.2193027

24 September 2015 Two-dimensional thickness measurement using acousto-optically tuned external cavity laser diode

Takamasa Suzuki, Shingo Abe, Samuel Choi

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 96281K (2015) https://doi.org/10.1117/12.2193027
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

We propose a swept source optical coherence tomography that uses an original external-cavity laser diode and demonstrate measurements of thickness distribution in two dimensions using this equipment. We first conducted high-speed, wide-range wavelength scanning with an external-cavity laser diode that was equipped with a special antireflection-coated laser diode working at 770 nm. Using an acousto-optic deflector enabled a tuning range and rate of 22 nm and 20 kHz, respectively, with no mechanical elements. Next, we applied this source to an optical coherence tomography and measured the two-dimensional distribution of thickness of a thin glass plate.

Citation Download Citation

Takamasa Suzuki, Shingo Abe, and Samuel Choi "Two-dimensional thickness measurement using acousto-optically tuned external cavity laser diode", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96281K (24 September 2015); https://doi.org/10.1117/12.2193027

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