SPM metrological assurance using a heterodyne interferometer

T. V. Kazieva; A. P. Kuznetsov; K. L. Gubskiy; V. N. Reshetov; M. V. Ponarina; A. S. Antonov; A. S. Useinov

doi:10.1117/12.2199874

21 October 2015 SPM metrological assurance using a heterodyne interferometer

T. V. Kazieva, A. P. Kuznetsov, K. L. Gubskiy, V. N. Reshetov, M. V. Ponarina, A. S. Antonov, A. S. Useinov

Proceedings Volume 9636, Scanning Microscopies 2015; 96360R (2015) https://doi.org/10.1117/12.2199874
Event: SPIE Scanning Microscopies, 2015, Monterey, California, United States

Abstract

Three-coordinate laser interferometer was designed to enable metrological measurements using conventional scanning probe microscopes. This article presents the results of the errors sources investigation in three-coordinate laser interferometer, describes the features of the optical scheme and data processing system that ensure sub-nanometer accuracy of the measurements.

Citation Download Citation

T. V. Kazieva, A. P. Kuznetsov, K. L. Gubskiy, V. N. Reshetov, M. V. Ponarina, A. S. Antonov, and A. S. Useinov "SPM metrological assurance using a heterodyne interferometer", Proc. SPIE 9636, Scanning Microscopies 2015, 96360R (21 October 2015); https://doi.org/10.1117/12.2199874

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