Effect of silicon carbide ceramic coating process on the mirror surface quality

Peipei Wang; Li Wang; Gang Wang; Yunli Bai; Peng Wang; Zhenghang Xiao

doi:10.1117/12.2242637

28 October 2016 Effect of silicon carbide ceramic coating process on the mirror surface quality

Peipei Wang, Li Wang, Gang Wang, Yunli Bai, Peng Wang, Zhenghang Xiao

Author Affiliations +

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830N (2016) https://doi.org/10.1117/12.2242637
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Silicon carbide, as a new reflector material, its excellent physical and chemical properties has been widely recognized by the industry. In order to make SiC mirror better used in space optical system, we used digital coating equipment during its coating process. By using ion-assisted electron evaporation method, we got a complete metal reflective film system on the surface of finely polished silicon carbide mirror. After automated coating process, by adjusting the coating parameters during the process, the surface roughness of silicon carbide improved from 7.8 nm to 5.1 nm, and the average optical reflectance of the surface reached 95% from visible to near-infrared. The metal reflective film system kept well after annealing and firmness test. As a result, the work of this paper will provide an important reference for high-precision coating process on large diameter SiC mirror.

Citation Download Citation

Peipei Wang, Li Wang, Gang Wang, Yunli Bai, Peng Wang, and Zhenghang Xiao "Effect of silicon carbide ceramic coating process on the mirror surface quality", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830N (28 October 2016); https://doi.org/10.1117/12.2242637

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KEYWORDS

Silicon carbide

Coating

Reflectivity

Metals

Mirrors

Silicon films

Surface roughness

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