In this paper, we focus on the application of layout decomposition where stitching is not allowed such as for contact and via layers. We propose a linear programming and iterative rounding (LPIR) solving technique to reduce the number of non-integers in the LP relaxation problem. Experimental results show that the proposed algorithms can provide high quality decomposition solutions efficiently while introducing as few conflicts as possible. |
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Cited by 5 scholarly publications.
Lithography
Manufacturing
Metals
Directed self assembly
Semiconductors
Silicon carbide
New and emerging technologies