Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave

Xin Kang; Shuai Dong

doi:10.1117/12.2214138

26 January 2016 Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave

Xin Kang, Shuai Dong

Author Affiliations +

Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99031U (2016) https://doi.org/10.1117/12.2214138
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China

Abstract

This study presents the electromechanical response of a piezoelectric laminated micro plate under the excitation of an ultrasonic wave. The laminated plate consists of a piezoelectric layer (AlN), an elastic layer (SiO₂) and two electrode layers (Au and Pt). Since the whole thickness of the plate is in micro scale, the size dependence of the dynamic behavior of the laminated plate is evaluated using the couple stress theory. The results show that the bending rigidity of the micro plate increases when the size effect is considered and the amplitudes of output of electric charge and voltage are reduced accordingly when the plate is excited by ultrasonic wave. Also the resonant frequency of the laminated plate increase because of the enhancement of the bending rigidity of the plate. The analysis results can provide a reference for the design of micromachined piezoelectric sensors.

Citation Download Citation

Xin Kang and Shuai Dong "Response of piezoelectric laminated micro plates under the excitation of an ultrasonic wave", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031U (26 January 2016); https://doi.org/10.1117/12.2214138

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