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1 April 2022 Multi-photon polymerization by GHz burst mode femtosecond laser pulses for improvement of process resolution
Kotaro Obata, Francesc Caballero Lucas, Koji Sugioka
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Proceedings Volume PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; PC1198803 (2022) https://doi.org/10.1117/12.2610529
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
Recently, GHz burst-mode fs laser pulses, which consists of pulse trains with extremely short intervals of several hundred ps, show superior processing characteristics in laser ablation to the conventional femtosecond laser processing (single mode) at the same average power. The GHz bursts of fs laser enables to induce ablation before the residual thermal energy deposited by preceding pulses diffuses away from the processed area, resulting in the reduction of the ablation threshold and enhancement of ablation efficiency. In this study, we apply the GHz burst mode fs laser pulses for MPP of photo-sensitive polymers to explore the effect of the burst on photochemical reaction.
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Kotaro Obata, Francesc Caballero Lucas, and Koji Sugioka "Multi-photon polymerization by GHz burst mode femtosecond laser pulses for improvement of process resolution", Proc. SPIE PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, PC1198803 (1 April 2022); https://doi.org/10.1117/12.2610529
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KEYWORDS
Femtosecond phenomena
Polymerization
Laser ablation
Multiphoton processes
Polymers
Energy efficiency
Laser damage threshold
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