CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography

Yaqiong Li

doi:10.1117/12.2630465

29 August 2022 CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography

Yaqiong Li

Author Affiliations +

Proceedings Volume PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI; PC1219018 (2022) https://doi.org/10.1117/12.2630465
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Conference Poster

Abstract

This conference presentation was prepared for the Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI conference at SPIE Astronomical Telescopes + Instrumentation, 2022.

Citation Download Citation

Yaqiong Li "CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography", Proc. SPIE PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI, PC1219018 (29 August 2022); https://doi.org/10.1117/12.2630465

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE