Gradually varying thickness thin-film waveguide was applied to tip-enhanced Raman spectroscopy of molecular films and dielectric substrate. The waveguide as a scanning probe with nanometer-resolution showed that high-durability, a long lifetime, good reproducibility, and an electric field enhancement up to ~10^7. Finite element analysis indicated that the waveguide works in 3.8-octave spanning with high stability, tolerance, and design freedom.
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