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23 August 2023 Efficient reconstruction of model parameters using Bayesian target-vector optimization
Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
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Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC1261905 (2023) https://doi.org/10.1117/12.2673590
Event: SPIE Optical Metrology, 2023, Munich, Germany
Abstract
Parameter reconstruction problems appear frequently in optical metrology. Here, one attempts to explain a set of K experimental measurements by fitting to them a parameterized forward model of the measurement process. We present a Bayesian target vector optimization scheme that can be used to perform this fit. It has been shown to be capable of outperforming established methods such as Levenberg-Marquardt, and can after a successful fit enable very efficient and accurate determination of the distribution of the reconstructed model parameters using Markov chain Monte Carlo sampling.
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Matthias Plock, Sven Burger, and Philipp-Immanuel Schneider "Efficient reconstruction of model parameters using Bayesian target-vector optimization", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC1261905 (23 August 2023); https://doi.org/10.1117/12.2673590
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KEYWORDS
Mathematical optimization
Education and training
Monte Carlo methods
Optical metrology
Process modeling
Computer programming languages
Global Positioning System
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