CGH Interferometer system for two-dimensional curved x-ray mirror production

Shunichiro Matsuzaka; Toshio Nakano; Toshiki Taniguchi; Hiroki Nakamori; Akira Miyake

doi:10.1117/12.2678529

4 October 2023 CGH Interferometer system for two-dimensional curved x-ray mirror production

Shunichiro Matsuzaka, Toshio Nakano, Toshiki Taniguchi, Hiroki Nakamori, Akira Miyake

Proceedings Volume PC12695, Advances in Metrology for X-Ray and EUV Optics X; PC1269504 (2023) https://doi.org/10.1117/12.2678529
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Recently two-dimensional curved X-ray mirrors such as ellipsoidal and rotational Wolter mirrors have become widely used at synchrotron radiation facilities. Although microstitching interferometry (MSI) can measure surface figures, it takes a long time to obtain surface figure data because of the small field of view for a steeply curved surface. To improve productivity, we are developing a high throughput CGH (Computer Generated Hologram) interferometer system. To fit the CGH wavefront to the mirror surface, we use cylindrical wavefront CGHs for the interferometer system, as part of two-dimensional curved X-ray mirrors that can be approximated by a cylindrical surface. We will give a developing status of our CGH interferometer system.

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Citation Download Citation

Shunichiro Matsuzaka, Toshio Nakano, Toshiki Taniguchi, Hiroki Nakamori, and Akira Miyake "CGH Interferometer system for two-dimensional curved x-ray mirror production", Proc. SPIE PC12695, Advances in Metrology for X-Ray and EUV Optics X, PC1269504 (4 October 2023); https://doi.org/10.1117/12.2678529

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KEYWORDS

Mirrors

Computer generated holography

X-rays

Interferometers

Mirror surfaces

Data corrections

Holographic interferometers

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