CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12887 > Article
Presentation
16 March 2024 Mist CVD for tailoring five Ga2O3 polymorphs via epitaxial growth techniques
Hiroyuki Nishinaka
Author Affiliations +
Proceedings Volume PC12887, Oxide-based Materials and Devices XV; PC128870F (2024) https://doi.org/10.1117/12.3009060
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
Recently, Ga2O3 has garnered significant attention as an ultrawide bandgap semiconductor, possessing a bandgap of approximately 5 eV. Ga2O3 exists in five polymorphs: α, β, γ, δ, and κ phases. This presentation will discuss the control of these five polymorphs using mist chemical vapor deposition (CVD) and epitaxial techniques. From an epitaxial growth standpoint, maintaining a small lattice mismatch between the thin films of interest and the underlying layers, such as substrates and buffer layers, is of significant importance. For instance, among these five polymorphs, the existence of the δ-phase remains a subject of debate within the Ga2O3 research community. Nevertheless, the utilization of small lattice-mismatched β-Fe2O3 buffer layers, grown using mist CVD, has enabled the growth of δ- Ga2O3 epitaxial thin films. In addition to discussing the δ-phase, this presentation will also encompass the epitaxial growth of the other four polymorphs of Ga2O3.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Hiroyuki Nishinaka "Mist CVD for tailoring five Ga2O3 polymorphs via epitaxial growth techniques", Proc. SPIE PC12887, Oxide-based Materials and Devices XV, PC128870F (16 March 2024); https://doi.org/10.1117/12.3009060
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
;
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Chemical vapor deposition
Alloys
Thin films
Oxides
Semiconductors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top