Nanostructuring of versatile high-index photonic materials, like lithium niobate or silicon, offers the dense integration of highly functional devices. We will present our recent advances towards meta devices, including waveguides and metasurfaces, consisting of nanoresonators as their versatile building blocks. Furthermore, we will present a nanofabrication scheme towards strongly guiding wafer-scale integrated circuits. Both approaches are the basis for enabling various applications, where we explore foremost the quantum information field.
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