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Wave plates, also known as phase retarders, are essential elements for altering the phase of light in various optical devices, such as liquid crystal displays, interferometry, and optical microscopy. Although soft materials (such as liquid crystals and polymers) are the most well-known methods for fabricating wave plates, there are still disadvantages in commercial products, including chromatic behavior, high cost, and the difficulty of making biaxial retarders. In recent years, advances in nanoscale synthesis have opened up a new approach for wave plate fabrication. In this work, one-dimensional dielectric nano-grating wave plates were fabricated using laser interference lithography, which is an efficient and low-cost method among nano-patterning techniques. By varying the parameters of the interference lithography process, we were able to modify the geometry of the nano-pattern. We investigated the influence of different dielectric materials with high and low refractive indices, as well as the pattern geometry, on the anisotropic properties. The wave plates were characterized using in-plane, out-of-plane retardation measurements and UV-vis spectrometry.
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Amorphous IGZO (a-IGZO) is a versatile semiconductor material with excellent electron mobility, transparency, flexible stability, and low power consumption, making it an attractive option for use in transparent electronic devices with energy efficiency. However, the intricate fabrication methods involved in incorporating various component layers, such as the dielectric layer in a thin film transistor (TFT) device, pose a limitation for this emerging material. In this study, a cutting-edge transparent-flexible TFT is presented, featuring a simplified fabrication process utilizing only radiofrequency (RF) sputtering. By carefully manipulating the sputtering parameters, a fully transparent stacked-metal oxide layer structure is achieved, exhibiting a transparency of 80.37 % and good electrical characteristics. The realization of this topic holds significant value for the development of transparent, flexible, and energy-efficient electronic displays.
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