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11 April 2024 Ablation plume analysis for pulsed laser deposition to understand existing shortcomings
Thomas K. Lippert
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Proceedings Volume PC12939, High-Power Laser Ablation VIII; PC129390D (2024) https://doi.org/10.1117/12.2692844
Event: SPIE High-Power Laser Ablation, 2024, Santa Fe, New Mexico, United States
Abstract
Ablation plume analysis showed that the most important problems of PLD, i.e. complex deviations of the film composition are clearly related to the properties of the ablation plume. The variation of the deposition conditions combined with plume analysis suggests also certain approaches how to overcome these problems, e.g. by varying background gases and pressures, but also when more drastic approaches must be used, e.g. an enrichment of certain elements in the target.
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Thomas K. Lippert "Ablation plume analysis for pulsed laser deposition to understand existing shortcomings", Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC129390D (11 April 2024); https://doi.org/10.1117/12.2692844
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KEYWORDS
Chemical composition
Ablation
Laser ablation
Pulsed laser deposition
Laser processing
Oxygen
Plasmas
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