Comparison of long-term resilience of aluminum oxide protective coating on Ag-mirrors via low temperature atomic layer deposition using water and high-purity ozone as oxygen precursors

Søren A. Tornøe; Brandon Cheney; Andrew C. Phillips; Takayuki Hagiwara; Tetsuya Nishiguchi; Nobuhiko P. Kobayashi

doi:10.1117/12.3028878

3 October 2024 Comparison of long-term resilience of aluminum oxide protective coating on Ag-mirrors via low temperature atomic layer deposition using water and high-purity ozone as oxygen precursors

Søren A. Tornøe, Brandon Cheney, Andrew C. Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, Nobuhiko P. Kobayashi

Author Affiliations +

Proceedings Volume PC13114, Low-Dimensional Materials and Devices 2024; PC1311404 (2024) https://doi.org/10.1117/12.3028878
Event: Nanoscience + Engineering, 2024, San Diego, California, United States

Abstract

Silver (Ag) excels as a metal-base for astronomical mirrors for its high reflectivity across the visible to infrared spectral range. However, Ag degrades quickly in an observatory environment, necessitating a protective coating like aluminum oxide (AlOx). Our study compares using water (H2O) and high-purity ozone (PO) as oxygen precursors for AlOx a protective coating on Ag using low-temperature atomic layer deposition (ALD). At ~80% purity, PO allows for higher quality films compared to that of H2O, while offering a reduced deposition time. After enduring high humidity high temperature (HTHH) testing, H2O samples showed a substantial reduction in reflectivity (~30%), while PO samples boasted a minimal reflectivity reduction (~12%). Ellipsometry revealed a 74 nm phase shift, compared to a 6 nm shift for H2O and PO respectively; indicating improved structural integrity. AFM and EDS analysis revealed H2O samples underwent erratic structural changes compromising integrity, while PO samples showed minimal structural change.

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Søren A. Tornøe, Brandon Cheney, Andrew C. Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, and Nobuhiko P. Kobayashi "Comparison of long-term resilience of aluminum oxide protective coating on Ag-mirrors via low temperature atomic layer deposition using water and high-purity ozone as oxygen precursors", Proc. SPIE PC13114, Low-Dimensional Materials and Devices 2024, PC1311404 (3 October 2024); https://doi.org/10.1117/12.3028878

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KEYWORDS

Atomic layer deposition

Oxygen

Ozone

Protective coatings

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