Poster
3 October 2024 In situ Raman spectroscopy for 2D material manufacturing process
Hung-Pin Chen, Wei-Chun Chen, Jin-Yu Shih, Kun-An Chiu, Wei-Lin Wang, Hua-Lin Chen, Yu-Wei Lin, Che-Chin Chen
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Conference Poster
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Hung-Pin Chen, Wei-Chun Chen, Jin-Yu Shih, Kun-An Chiu, Wei-Lin Wang, Hua-Lin Chen, Yu-Wei Lin, and Che-Chin Chen "In situ Raman spectroscopy for 2D material manufacturing process", Proc. SPIE PC13114, Low-Dimensional Materials and Devices 2024, PC131140U (3 October 2024); https://doi.org/10.1117/12.3027576
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KEYWORDS
Raman spectroscopy

2D materials

Manufacturing

Materials processing

Contamination

Raman scattering

Semiconductors

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