Integrating high-k into production, 2001-2007

doi:10.1117/3.2572061.ch28

Book: Fortunes of High-Tech: a History of Innovation at ASM International

Author(s): Jorijn van Duijn

Published: 2019

https://doi.org/10.1117/3.2572061.ch28

Abstract

In the third act of this innovation story, the gate stack development entered a highly competitive phase. The right material for the high-k dielectric was selected, and the production technique and materials were integrated into a complete chip production chain. How chip manufacturers controlled the integration of the new production techniques in their existing manufacturing lines was highly proprietary. This knowledge defined their ability to compete.