Atmospheric pressure chemical vapor deposition, 1969-1974

doi:10.1117/3.2572061.ch7

Book: Fortunes of High-Tech: a History of Innovation at ASM International

Author(s): Jorijn van Duijn

Published: 2019

https://doi.org/10.1117/3.2572061.ch7

Abstract

In the early 1970s, ASM took a leap of faith and produced its first piece of semiconductor production equipment: an atmospheric pressure chemical vapor deposition machine. It was a bold move away from its conventional mode of operation, as a representative of predominantly American equipment and materials used in semiconductor manufacturing (cf. Business I). Selling someone else’s products proved to be a lucrative business, because in that same year ASM enjoyed healthy sales of around 1.3 million Dutch guilders. Since the establishment as Del Prado’s one-man-business in 1964, ASM had been growing beautifully indeed.