Plasma Enhanced Chemical Vapor Deposition, 1978-1980s

doi:10.1117/3.2572061.ch9

Book: Fortunes of High-Tech: a History of Innovation at ASM International

Author(s): Jorijn van Duijn

Published: 2019

https://doi.org/10.1117/3.2572061.ch9

Abstract

In the late 1970s, ASM gradually warmed to its role as supplier of CVD technology. With every machine sold, the company received customer feedback, gained more experience with the previous generations of tools, and learned about new technologies buzzing around throughout the rapidly developing industry. This accumulation did not occur evenly across the ASM subsidiaries located on the different continents. Gaps in expertise arose as a consequence of the physical separation, the limited communication technologies spanning this distance, and the still very distinct local requirements.