Chemical Vapor Deposition and Dielectric Thin Films

doi:10.1117/3.924283.ch10

Book: Introduction to Semiconductor Manufacturing Technology, Second Edition

Author(s): Hong Xiao

Published: 2012

https://doi.org/10.1117/3.924283.ch10

Author Affiliations +

Abstract

In the semiconductor industry, electrically insulating materials are commonly called dielectrics. Dielectric thin-film processes are adding processes because they add a thin layer of dielectric materials to the wafer surface. While the majority of dielectric thin-film processing is CVD processing, spin-on dielectric processes are also used in IC manufacturing. The main issues with dielectric thin-film processes are filling gaps without voids, deposition of uniform film with high throughput, and making the final surface as planarized as possible.