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JM3 Technical Content Guidelines

JM3 encourages full disclosure of formulation and processing information. Please review the technical content guidelines below prior to authoring or reviewing a JM3 paper.

 

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Computational lithography metrology and masks metrology and masks

Computational Lithography Guidelines


Metrology and Masks Guidelines  


Patterning Tools
Guidelines

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lithography materials plasma-etch technology

Lithography Materials Guidelines


Plasma-Etch Technology Guidelines

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Read here

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