Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen; Olivia Del Guercio; Thi Huong Au; Duc Thien Trinh; Nguyen Phuong Thao Mai; Ngoc Diep Lai

doi:10.1117/1.OE.57.4.041406

1 March 2018 Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, Ngoc Diep Lai

Author Affiliations +

Optical Engineering, Vol. 57, Issue 4, 041406 (March 2018). https://doi.org/10.1117/1.OE.57.4.041406

Abstract

We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.

Citation Download Citation

Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, and Ngoc Diep Lai "Optical lithography of three-dimensional magnetophotonic microdevices," Optical Engineering 57(4), 041406 (1 March 2018). https://doi.org/10.1117/1.OE.57.4.041406

Received: 22 September 2017; Accepted: 9 February 2018; Published: 1 March 2018

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

CITATIONS

Cited by 22 scholarly publications.

Explore citations on Lens.org

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Magnetism

Nanocomposites

Fabrication

Optical lithography

Scanning electron microscopy

Absorption

Iron

Show All Keywords

RELATED CONTENT

Novel polymeric sulfonium photoacid generator and its application for chemically...
Proceedings of SPIE (March 27 2014)

Fabrication of controllable form submicrometer structures on positive photoresist by...
Proceedings of SPIE (April 18 2016)

LOPA based direct laser writing of multi dimensional and multi...
Proceedings of SPIE (February 20 2017)

Mask lithography of 2D fluorescent magneto photonic microstructures for biomedical...
Proceedings of SPIE (March 07 2019)

Rapid fabrication of two and three dimensional photonic crystals...
Proceedings of SPIE (August 26 2005)

Design, fabrication, and characterization of 3D photonic crystals constructed from...
Proceedings of SPIE (February 24 2006)

Subscribe to Digital Library

Receive Erratum Email Alert

Show All Keywords

Keywords/Phrases

Search In:

Publication Years