Open Access
26 June 2012 Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation
Konstantin Koshelev, Vladimir V. Ivanov, Viacheslav Medvedev, Vladimir M. Krivtsun, Vladimir G. Novikov, Alexander S. Grushin
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Abstract
Abstract unavailable.

This article [J. Micro/Nanolith. MEMS MOEMS, 11, 021112 (2012)] was originally published online on 21 May 2012 with four errors. The phrase “return-to-zero line” should have been “RZLINE” in the title, abstract, keywords, and introduction. The paper was corrected on 4 June 2012 and appears correctly in print.

© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
Konstantin Koshelev, Vladimir V. Ivanov, Viacheslav Medvedev, Vladimir M. Krivtsun, Vladimir G. Novikov, and Alexander S. Grushin "Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 029802 (26 June 2012). https://doi.org/10.1117/1.JMM.11.2.029802
Published: 26 June 2012
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Cited by 2 scholarly publications.
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KEYWORDS
Extreme ultraviolet

Plasma

Tin

Ultraviolet radiation

Spectroscopy

Applied mathematics

Mathematical modeling

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