Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Elnaz Afsharipour; Ramin Soltanzadeh; Byoungyoul Park; Dwayne Chrusch; Cyrus Shafai

doi:10.1117/1.JMM.18.1.015001

14 January 2019 Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, Cyrus Shafai

Author Affiliations +

Funded by: Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada (NSERC Canadian Network for Research and Innovation in Machining Technology), University of Manitoba Graduate Fellowship (UMGF)

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 1, 015001 (January 2019). https://doi.org/10.1117/1.JMM.18.1.015001

Abstract

A low-power three-degree-of-freedom scanning micromirror is presented. The 2- × 2-mm mirror is a gimbaless structure, directly supported by single-crystal microsprings. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third-axis. The transient and frequency responses of the micromirror are analyzed. The Lagrange’s equations of motions describing the dynamic behavior of the system are presented and show a good agreement with the experimental results. The fabricated microelectromechanical system mirror demonstrates a tilt angle of 22.8 deg at 247.5 Hz about y-axis, and 13.3 deg at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20-mA current on the mirror. Power consumption is 2.6 mW of power in tilting motions in resonant operation. With a total DC-drive current of 110 mA, 232-μm linear motion is achieved.

Citation Download Citation

Elnaz Afsharipour, Ramin Soltanzadeh, Byoungyoul Park, Dwayne Chrusch, and Cyrus Shafai "Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 015001 (14 January 2019). https://doi.org/10.1117/1.JMM.18.1.015001

Received: 18 September 2018; Accepted: 14 December 2018; Published: 14 January 2019

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