Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

Andreas Tortschanoff; Albert Frank; Michael Wildenhain; Thilo Sandner; Andreas Kenda

doi:10.1117/1.3609230

1 July 2011 Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

Andreas Tortschanoff, Albert Frank, Michael Wildenhain, Thilo Sandner, Andreas Kenda

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 3, 033006 (July 2011). https://doi.org/10.1117/1.3609230

Abstract

We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Andreas Tortschanoff, Albert Frank, Michael Wildenhain, Thilo Sandner, and Andreas Kenda "Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(3), 033006 (1 July 2011). https://doi.org/10.1117/1.3609230

Published: 1 July 2011

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