Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness

Jianbin Su; Dingbang Xiao; Xuezhong Wu; Zhanqiang Hou; Zhihua Chen

doi:10.1117/1.JMM.12.3.033008

2 August 2013 Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness

Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhanqiang Hou, Zhihua Chen

Author Affiliations +

Funded by: National Natural Science Foundation of China

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 3, 033008 (August 2013). https://doi.org/10.1117/1.JMM.12.3.033008

Abstract

We present a dynamic electrical balancing of coupling stiffness for improving the bias stability of micromachined gyroscopes, which embeds the coupling stiffness in a closed-loop system to make the micromachined gyroscope possess more robust bias stability by suppressing the variation of coupling stiffness. The effect of the dynamic electrical balancing control is theoretically analyzed and implemented using a silicon micromachined gyroscope as an example case. It has been experimentally shown that, comparing with open loop detection, the proposed method increased the stability of the amplitude of the mechanical quadrature signal by 38 times, and therefore improved the bias stability by 5.2 times from 89 to 17 deg/h , and the temperature stability of scale factor by 2.7 times from 622 to 231 ppm/°C . Experimental results effectively indicated the theoretical model of dynamic electrical balancing of coupling stiffness.

Citation Download Citation

Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhanqiang Hou, and Zhihua Chen "Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(3), 033008 (2 August 2013). https://doi.org/10.1117/1.JMM.12.3.033008

Published: 2 August 2013

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