Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging

Lei Wu; Huikai Xie

doi:10.1117/1.3082186

1 January 2009 Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging

Lei Wu, Huikai Xie

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 1, 013030 (January 2009). https://doi.org/10.1117/1.3082186

Abstract

We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with ±45-deg (or 90-deg) mechanical scan angle (MSA), where each reflective mirror surface contributes a 180-deg optical scanning. A novel surface- and bulk-combined micromachining process based on silicon on insulator (SOI) wafers is developed for fabricating the dual-reflective micromirror. The mirror flatness is maintained by the single-crystal-silicon device layer of SOI wafers, and aluminum is coated on both sides for reflection. A fabricated device demonstrated about half circumferential scanning range at resonance of 425 Hz. Other measured data include the radii of curvature, −129 mm (front surface) and 132 mm (back surface), and the reflectance, 86.3% (front surface) and 84.2% (back surface). This micromirror has the potential to realize full-circumferential-scanning EOCT imaging.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Lei Wu and Huikai Xie "Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(1), 013030 (1 January 2009). https://doi.org/10.1117/1.3082186

Published: 1 January 2009

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