Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission

Xiangdong Kong; Yuegang Fu; Weiguo Zhang; Lianhe Dong; Jianhong Zhou; Deqiang Wang

doi:10.1117/1.JNP.11.036019

15 September 2017 Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission

Xiangdong Kong, Yuegang Fu, Weiguo Zhang, Lianhe Dong, Jianhong Zhou, Deqiang Wang

Author Affiliations +

Funded by: National 973 Program of China, National 973 Program, Natural Science Foundation of China, National Natural Science Foundation of China, Fundamental & Advanced Research Project of Chongqing, China, Fundamental and Research Project of Chongqing, China, Fundamental and advanced research projects of Chongqing, Chongqing micro-nano fabrication and inspection public service platform, 111 Project of China, Project of China, “111” Project of China

Journal of Nanophotonics, Vol. 11, Issue 3, 036019 (September 2017). https://doi.org/10.1117/1.JNP.11.036019

Abstract

The random antireflective structures are modeled by the analysis of the random morphology distribution. According to the effective medium theory, the transmission of the antireflective structure is calculated by dividing the structure into multilayer, and the dependence on parameters of the subwavelength is analyzed in detail. In the single-variable condition, etching depth, half breadth of distribution, and median of distribution get a positive correlation with the transmittance where the etching depth plays a most important part in enhancing the transmittance, whereas the angle of structures gets a negative correlation. The experimental results coincide well with the calculation and analysis. The analysis offers a theory guidance to fabricate random subwavelength antireflected structures using metal dewetting.

Citation Download Citation

Xiangdong Kong, Yuegang Fu, Weiguo Zhang, Lianhe Dong, Jianhong Zhou, and Deqiang Wang "Analysis of random antireflective structures fabricated by silver dewetting to enhance transmission," Journal of Nanophotonics 11(3), 036019 (15 September 2017). https://doi.org/10.1117/1.JNP.11.036019

Received: 22 May 2017; Accepted: 23 August 2017; Published: 15 September 2017

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