Dielectric multilayer grating designs with maximum diffraction efficiencies

Marcus Frank; Martin Collischon

doi:10.1117/1.601896

1 June 1998 Dielectric multilayer grating designs with maximum diffraction efficiencies

Marcus Frank, Martin Collischon

Optical Engineering, Vol. 37, Issue 6, (June 1998). https://doi.org/10.1117/1.601896

Diffraction efficiencies of binary dielectric multilayer gratings are calculated by combining thin film theory and scalar electromagnetic theory, and results are compared with efficiencies of conventional binary gratings, consisting of one single bulk material. By optimizing the number of layers and layer parameters such as material and layer thickness, multilayer grating designs are obtained showing diffraction efficiencies in the desired order close to the theoretical maximum and suppressing the zeroth diffraction order effectively. To meet technological requirements of etching processes such as a suitable etch-depth control, parameters of etch-stop layers are included into the calculation and optimization procedure. Manufacturing dielectric multilayer gratings including etch-stop layers will make it possible to obtain uniform etch profiles, a moderate surface roughness in the etched area, and high accuracies in etch depth without any online control devices.

Citation Download Citation

Marcus Frank and Martin Collischon "Dielectric multilayer grating designs with maximum diffraction efficiencies," Optical Engineering 37(6), (1 June 1998). https://doi.org/10.1117/1.601896

Published: 1 June 1998

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available