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1 April 2007 Phase-contrast microscopy by in-line phase-shifting digital holography: shape measurement of a titanium pattern with nanometer axial resolution
Jeon Woong Kang, Chung-Ki Hong
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Optical Engineering, Vol. 46, Issue 4, 040506 (April 2007). https://doi.org/10.1117/1.2731317
Abstract
Precision phase-contrast imaging has been achieved with in-line phase-shifting digital holographic microscopy. The complex amplitude of the object field on the charge-coupled device plane is measured by the phase-shifting method with a self-calibration algorithm, and the magnified object image is reconstructed with a plane wave expansion method. The phase fluctuation in the blank image without sample is 1.30 deg and the three-dimensional shape of a titanium phase test pattern is measured with an accuracy of 5.51 nm (corresponding to the phase resolution of 3.63 deg), which are better than those of off-axis systems.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
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Jeon Woong Kang and Chung-Ki Hong "Phase-contrast microscopy by in-line phase-shifting digital holography: shape measurement of a titanium pattern with nanometer axial resolution," Optical Engineering 46(4), 040506 (1 April 2007). https://doi.org/10.1117/1.2731317
Published: 1 April 2007
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Cited by 14 scholarly publications and 1 patent.
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KEYWORDS
Titanium
Digital holography
3D image reconstruction
Charge-coupled devices
Phase shifts
Holography
Microscopy
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