Orientation identification of the power spectrum

Maria E. Rudnaya; Robert M. Mattheij; Joseph M. Maubach; Hennie G. ter Morsche

doi:10.1117/1.3633333

1 October 2011 Orientation identification of the power spectrum

Maria E. Rudnaya, Robert M. Mattheij, Joseph M. Maubach, Hennie G. ter Morsche

Author Affiliations +

Optical Engineering, Vol. 50, Issue 10, 103201 (October 2011). https://doi.org/10.1117/1.3633333

Abstract

The image Fourier transform is widely used for defocus and astigmatism correction in electron microscopy. The shape of a power spectrum (the square of a modulus of image Fourier transform) is directly related to the three microscope controls, namely, defocus and twofold (two-parameter) astigmatism. We propose a new method for power-spectrum orientation identification. The method is based on the three measures that are related to the microscope's controls. The measures are derived from the mathematical moments of the power spectrum and is tested with the help of a Gaussian benchmark, as well as with the scanning electron microscopy experimental images. The method can be used as an assisting tool for increasing the capabilities of defocus and astigmatism correction a of nonexperienced scanning electron microscopy user, as well as a basis for automated application.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Maria E. Rudnaya, Robert M. Mattheij, Joseph M. Maubach, and Hennie G. ter Morsche "Orientation identification of the power spectrum," Optical Engineering 50(10), 103201 (1 October 2011). https://doi.org/10.1117/1.3633333

Published: 1 October 2011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available