CO2 laser mitigation of the ultraviolet laser damage site on a fused silica surface

Zhou Fang; Yuan’an Zhao; Wei Sun; Zehan Li; Guohang Hu; Xiaofeng Liu; Dawei Li; Jianda Shao

doi:10.1117/1.OE.53.8.084107

8 August 2014 CO₂ laser mitigation of the ultraviolet laser damage site on a fused silica surface

Zhou Fang, Yuan’an Zhao, Wei Sun, Zehan Li, Guohang Hu, Xiaofeng Liu, Dawei Li, Jianda Shao

Author Affiliations +

Funded by: Chinese National Natural Science Foundation

Optical Engineering, Vol. 53, Issue 8, 084107 (August 2014). https://doi.org/10.1117/1.OE.53.8.084107

Abstract

The CO² laser mitigation method has been developed to mitigate the ultraviolet laser damage site on a fused silica surface. The mitigation process was monitored by an on-line white light scattering imaging system in order to ensure that the mitigation is successful. Additionally, a total internal reflection microscope was utilized to analyze the mitigation pit. By optimizing the laser mitigation parameters, the rough damage site can be replaced by a smooth Gaussian-shaped mitigation pit. The chemical composition of the damage sites and the CO² laser mitigation pits was also measured with energy dispersive x-ray spectroscopy. It reveals that the oxygen deficiency center defect of the ultraviolet laser damage site is removed after CO² laser mitigation, which helps us better understand the CO² laser mitigation process.

Citation Download Citation

Zhou Fang, Yuan’an Zhao, Wei Sun, Zehan Li, Guohang Hu, Xiaofeng Liu, Dawei Li, and Jianda Shao "CO₂ laser mitigation of the ultraviolet laser damage site on a fused silica surface," Optical Engineering 53(8), 084107 (8 August 2014). https://doi.org/10.1117/1.OE.53.8.084107

Published: 8 August 2014

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