Open Access
17 February 2021 Phase measuring deflectometry for obtaining 3D shape of specular surface: a review of the state-of-the-art
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Abstract

Phase measuring deflectometry (PMD) is a superior technique to obtain three-dimensional (3D) shape information of specular surfaces because of its advantages of large dynamic range, noncontact operation, full-field measurement, fast acquisition, high precision, and automatic data processing. We review the recent advances on PMD. The basic principle of PMD is introduced following several PMD methods based on fringe reflection. First, a direct PMD (DPMD) method is reviewed for measuring 3D shape of specular objects having discontinuous surfaces. The DPMD method builds the direct relationship between phase and depth data, without gradient integration procedure. Second, an infrared PMD (IR-PMD) method is reviewed to measure specular objects. Because IR light is used as a light source, the IR-PMD method is insensitive to the effect of ambient light on the measured results and has high measurement accuracy. Third, a proposed method is reviewed to measure the 3D shape of partial reflective objects having discontinuous surfaces by combining fringe projection profilometry and DPMD. Then, the effects of error sources that mainly include phase error and geometric calibration error on the measurement results are analyzed, and the performance of the 3D shape measurement system is also evaluated. Finally, the future research directions of PMD are discussed.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Zonghua Zhang, Caixia Chang, Xiaohong Liu, Ziyu Li, Yanqing Shi, Nan Gao, and Zhaozong Meng "Phase measuring deflectometry for obtaining 3D shape of specular surface: a review of the state-of-the-art," Optical Engineering 60(2), 020903 (17 February 2021). https://doi.org/10.1117/1.OE.60.2.020903
Received: 27 October 2020; Accepted: 25 January 2021; Published: 17 February 2021
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CITATIONS
Cited by 31 scholarly publications and 2 patents.
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KEYWORDS
3D metrology

LCDs

Deflectometry

Fringe analysis

Calibration

Error analysis

Reflectivity

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