Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: application of the TALON Wrap process

J. Dalvi-Malhotra; G. J. Brand; X.-F. Zhong

doi:10.1117/12.693290

7 March 2007 Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: application of the TALON Wrap process

J. Dalvi-Malhotra, G. J. Brand, X.-F. Zhong

Author Affiliations +

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 64620B (2007) https://doi.org/10.1117/12.693290
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Hydrolyzed silane primer solutions were made of an organosilane in glycolether diluted with a large amount of water with or without an acid as a catalyst. The newly developed primer compositions exhibited an extended shelf life of 3 months or more. The compositions were specially designed to accommodate ProTEK^TM. layer adhesion in the TALON Wrap. process. In this application, a spin-coatable polymeric material, ProTEK^TM., is applied as the protective coating to coat the top, edge, and underside rim of the wafer in preparation for backside etching. By applying an underlayer of primer and an overlayer of ProTEK^TM. coating to the top, edge and the bottom side rim of the wafer, an effective encapsulation of the wafer was achieved by using a custom-designed baffle. Each layer was applied by spin coating followed by baking at a wide temperature range. Thermal processing was followed by wet etching in KOH at an elevated temperature for . 10 hr. Post-etched wafers were rinsed with deionized (DI) water. Excellent edge profiles without "knife-edges" were obtained after etching the unprotected areas of the wafer. The process is fully automated because it is carried out in the TALON^TM automated wafer-processing tool. Intact films with no lifting or peeling were obtained during or after the KOH etch process/DI rinse for silicon substrates.

Citation Download Citation

J. Dalvi-Malhotra, G. J. Brand, and X.-F. Zhong "Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: application of the TALON Wrap process", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620B (7 March 2007); https://doi.org/10.1117/12.693290

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