Dr. Abderrazzaq Benatmane Profile

Dr. Abderrazzaq Benatmane

at CNRS

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Author

Publications (3)

Proceedings Article | 1 September 2004 Paper

Fabrication of multilevel reflective diffractive optical elements by means of laser ablation lithography

Sandrine Aubry, Philippe Gerard, Manuel Flury, Abderrazzaq Benatmane, Jean Pierre Schunck, Joel Fontaine, Paul Montgomery

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.545394

KEYWORDS: Diffractive optical elements, Etching, Reflectivity, Laser ablation, Finite-difference time-domain method, Lithography, Diffraction, Photomasks, Fabrication, High power lasers

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Proceedings Article | 16 May 2003 Paper

Phase stepping microscopy for rapid control of laser crystallization of Si for flat panel display applications

A. Benatmane, Paul Montgomery, Eric Fogarassy

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.479598

KEYWORDS: Laser crystals, Silicon, Crystals, Microscopy, Semiconductor lasers, Thin films, Annealing, Beam controllers, Laser applications, Flat panel displays

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SPIE Journal Paper | 1 October 2002

Rapid prototyping of diffractive optical elements for high-power lasers using laser ablation lithography fabrication and coherence probe microscopy analysis

Manuel Flury, A. Benatmane, Philippe Gerard, Paul Montgomery, Joel Fontaine, Thierry Engel, J.P. Schunck

OE, Vol. 41, Issue 10, (October 2002) https://doi.org/10.1117/12.10.1117/1.1501569

KEYWORDS: Diffractive optical elements, Silicon, Rapid manufacturing, Laser ablation, Etching, High power lasers, Surface roughness, Photomasks, Lithography, Microscopy

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