The paper presents the results of an investigation into the thermal and optical characteristics of alpha-type dual-mirror
grazing incidence collectors for Extreme Ultra-violet Lithography integrated into a tin-fueled discharge produced plasma
source. The performance of the system is assessed at various power levels and temperature conditions. The thermal and
the optical data, in particular images at extra-focal planes behind the intermediate focus, are compared to the predictions
of the thermo-optical model of the system. The data we present provide verification of the models used to design the
collector and validation of the thermo-optical modeling approach for design of future generations of collectors.
Key features of the RIM-13 EUV actinic reticle imaging microscope are summarised. This is a tool which generates aerial images from blank or patterned EUV masks, emulating the illumination and projection optics of an exposure tool. Such images of mask defects, acquired by a CCD camera, are analysed using the tool software to predict their effect on resist exposure. Optical, mechanical and software performance of the tool are reported.
Key features are presented of the RIM-13 reticle imaging microscope developed for actinic aerial image monitoring of blank and patterned EUV reticles. Details of the opto-mechanical design, module layout, major subsystems including the EUV source and performance of the tool are presented.
Key features are presented of two high-resolution EUV imaging tools: the MS-13 Microstepper wafer exposure and the RIM-13 reticle imaging microscope. The MS-13 has been developed for EUV resist testing and technology evaluation at the 32nm node and beyond, while the RIM-13 is designed for actinic aerial image monitoring of blank and patterned EUV reticles. Details of the design architecture, module layout, major subsystems and performance are presented for both tools.
Adam Brunton, Julian Cashmore, Peter Elbourn, Graeme Elliner, Malcolm Gower, Philipp Grunewald, M. Harman, S. Hough, N. McEntee, S. Mundair, D. Rees, P. Richards, V. Truffert, Ian Wallhead, Michael Whitfield
Key features are presented of the Exitech MS-13 EUV Microstepper tool developed for EUV resist testing & technology evaluation at the 32nm node and beyond. Details of the tool design architecture, module layout, vacuum chamber, major subsystems including source, optics and performance specifications are given.
Adam Brunton, Julian Cashmore, Peter Elbourn, Graeme Elliner, Malcolm Gower, Philipp Grunewald, M. Harman, S. Hough, N. McEntee, S. Mundair, D. Rees, P. Richards, V. Truffert, Ian Wallhead, Mike Whitfield
Key features are presented of the Exitech MS-13 EUV Microstepper tool developed for EUV resist testing & technology evaluation at the 32nm node and beyond. Details of the tool design architecture, module layout, vacuum chamber, major subsystems including source, optics and performance specifications are given.
We describe the design of Lobster-ISS, an X-ray imaging all-sky monitor (ASM) to be flown as an attached payload on the International Space Station. Lobster-ISS is the subject of an ESA Phase-A study which will begin in December 2001. With an instantaneous field of view 162 x 22.5 degrees, Lobster-ISS will map almost the complete sky every 90 minute ISS orbit, generating a confusion-limited catalogue of ~250,000 sources every 2 months. Lobster-ISS will use focusing microchannel plate optics and imaging gas proportional micro-well detectors; work is currently underway to improve the MCP optics and to develop proportional counter windows with enhanced transmission and negligible rates of gas leakage, thus improving instrument throughput and reducing mass. Lobster-ISS provides an order of magnitude improvement in the sensitivity of X-ray ASMs, and will, for the first time, provide continuous monitoring of the sky in the soft X-ray region (0.1-3.5 keV). Lobster-ISS provides long term monitoring of all classes of variable X-ray source, and an essential alert facility, with rapid detection of transient X-ray sources such as Gamma-Ray Burst afterglows being relayed to contemporary pointed X-ray observatories. The mission, with a nominal lifetime of 3 years, is scheduled for launch on the Shuttle c.2009.
We describe HERMES (High Energy Remote-Sensing of Mercury's Surface), a novel X-ray imaging spectrometer for potential accommodation in the Mercury Planetary Orbiter (MPO) component of ESA's BepiColombo mission to Mercury. The instrument combines recently developed micro channel plate optics with large-format compound semiconductor imaging arrays. MCP optics offer the distinct advantage of a large collecting area coupled to arcminute angular resolution in a light-weight package and short focal length. Measurements on a prototype optic indicate it should be possible to achieve an angular resolution below 1 arcmin over a fov of 1 degree(s). Energy resolution of 270 eV FWHM at 5.9 keV has been achieved at room temperature for a prototype GaAs array. We estimate that HERMES will detect ~2000 x-ray fluorescent photons s-1 from the surface of Mercury during solar quiet conditions at the pericenter of the orbit. The maximum expected surface spatial resolution from this altitude is ~200m and the fov 40 km2. Over the orbiter's 2 year mission life, HERMES will provide the first very high resolution compositional maps of any planetary surface.
We report on the performance of 6 micrometer pore diameter Microchannel Plates (MCPs) fabricated in 50 X 50 mm2 format, from both standard and radio-isotope free low noise glass, by Photonis SAS for a European Space Agency Technology Research Program. We compare them to MCPs manufactured by Photonis (the former Philips Photonics) for the High Resolution Camera (HRC) on NASA's Chandra X-ray observatory. The new MCPs represent a significant advance in MCP technology, having a much larger area than previously reported 6 micrometer plates, and demonstrating low noise 6 micrometer technology for the first time. The 6 micrometer plates are shown to be, mechanically, exceptionally well made with a defect density reduced by a factor of 2 - 5 compared to samples from the HRC flight blocks. They exhibit excellent gain and the expected 0.28 keV (Carbon K) X-ray quantum efficiency. The low noise plates have a very uniform response to X-rays but the standard glass MCPs do show inhomogeneity on both the global and multifiber scales.
In this paper we present and compare flight results with the latest results of the ground calibration for the HRC-I detector. In particular we will compare ground and in flight data on detector background, effective area, quantum efficiency and point spread response function.
The High Resolution Camera (HRC) is one of two focal plane instruments on the NASA Chandra X-ray Observatory which was successfully launched on July 23, 1999. The Chandra X-ray Observatory was designed to perform high resolution spectroscopy and imaging in the X-ray band of 0.07 to 10 keV. The HRC instrument consists of two detectors, HRC-I for imaging and HRC-S for spectroscopy. Each HRC detector consists of a thin aluminized polyimide blocking filter, a chevron pair of microchannel plates and a crossed grid charge readout. The HRC-I is an approximately 100 X 100 mm detector optimized for high resolution imaging and timing, the HRC-S is an approximately 20 X 300 detector optimized to function as the readout for the Low Energy Transmission Grating. In this paper we discuss the in-flight performance of the HRC-S, and present preliminary analysis of flight calibration data and compare it with the results of the ground calibration and pre-flight predictions. In particular we will compare ground data and in-flight data on detector background, quantum efficiency, spatial resolution, pulse height resolution, and point spread response function.
A novel type of micro-pore optics for the X-ray regime has been developed. These optics have a radial design instead of the square packing in the more traditional Lobster-eye optics. With such a design true imaging, without a crucifix in the focus, can be achieved. We demonstrate that the walls inside the square pores are good enough to produce sub- arcminute focussing up to photon energies above 10 keV. The current performance of the optics is limited by large-scale distortions of the plates, probably caused by the method to fuse the fibers together.
Lobster-eye optics have been proposed as an exciting development in the field of x-ray all-sky monitors. However, to date their potential has mainly been analyzed in the context of an all-sky monitor for a small satellite mission. We examine the wide range of parameters available for lobster-eye optics with different configurations. The sensitivity of the various schemes is calculated. We have also examined the current state of the art in actual lobster-eye optics. We present our experimental results and discuss realistic targets for manufacture. The impact of these targets on the calculated sensitivities is also described.
Two identical CsI-coated, low noise microchannel plate (MCP) detectors were taken to the Daresbury Synchrotron Radiation Source (SRS) to measure their quantum efficiencies over two different energy ranges - 450 eV to 1200 eV and 4.5 eV to 9.5 eV. The SRS was run in low ring current with the beam flux monitored using single wire gas proportional counters. We present accurate measurements of edge-related absolute quantum efficiency features due to the CsI photocathodes. This data will be incorporated into the calibration program of the Advanced X-ray Astrophysical Facility High Resolution Camera.
The high resolution camera (HRC) is a microchannel plate based imaging detector for the Advanced X-Ray Astrophysics Facility (AXAF) that will be placed in a high earth orbit scheduled for launch in August, 1998. An end-to-end calibration of the HRC and the AXAF high resolution mirror assembly (HRMA) was carried out at the Marshall Space Flight Center's X-Ray Calibration Facility (XRCF). This activity was followed by several modifications to the HRC to improve its performance, and a series of flat field calibrations. In this paper, and the following companion papers, we discuss the calibration plans, sequences, and results of these tests. At the time of this conference, the HRC has been fully flight qualified and is being integrated into the science instrument module (SIM) in preparation for integration into the AXAF spacecraft.
The high resolution camera (HRC) is one of two focal plane detector systems that will be flown on the Advanced X-ray Astrophysics Facility (AXAF). The HRC consists of two microchannel plate (MCP) detectors: one to provide large area, high position resolution imaging and timing (HRC-I), and a second (HRC-S) to provide a readout for the AXAF low energy transmission gratings. Each detector is composed of a chevron pair of CsI coated MCPs with a crossed grid charge detector and an Al/polyimide UV/ion shield. In this paper, we describe the operation, performance and calibration of the spectroscopic detector. In particular, we discuss the absolute quantum efficiency calibration, the point spread function of the instrument combined with the AXAF telescope, the count rate linearity, the spatial linearity, and the internal background of the instrument. Data taken in the laboratory and at the x-ray Calibration Facility at Marshall Space Flight Center are presented.
The high resolution camera (HRC) will be one of the two focal plane instruments on the Advanced X-ray Astrophysics Facility, (AXAF). AXAF will perform high resolution spectrometry and imaging in the X-ray band of 0.1 to 10 keV. The HRC instrument consists of two detectors, the HRC-I for imaging and the HRC-S for spectroscopy. Each HRC detector consists of a thin aluminized polyimide window, a chevron pair of microchannel plates (MCPs) and a crossed grid charge readout. The HRC-I is a 100 by 100 mm detector optimized for high resolution imaging and timing, the HRC-S is an approximately 30 by 300 mm detector optimized to function as the readout for the low energy transmission grating spectrometer (LETGS). In this paper we present the absolute quantum efficiency, spatial resolution, point spread response function and count rate linearity of the HRC-I detector. Data taken at the HRC laboratory and at the Marshall Space Flight Center X-ray Calibration Facility are presented. The development of the HRC is a collaborative effort between The Smithsonian Astrophysical Observatory, University of Leicester UK and the Osservatorio Astronomico, G.S. Vaiana, Palermo Italy.
We discuss the current status of the Advanced X-ray Astrophysics Facility (AXAF) High Resolution Camera (HRC) quantum efficiency (QE) calibration. The absolute quantum efficiency of flight candidate, CsI coated HRC microchannel plates (MCPs) for the imaging detector (HRC-I) manufactured by Galileo Electro-Optics Corporation (GEOC) has been measured at several energies. We find the absolute QE of these MCPs (measured at SAO) to be 0.41 at C Kalpha (E equals 277 eV) and 0.28 at Al Kalpha (E equals 1487) eV). The absolute QE of flight-like HRC-I MCPs manufactured by Phillips Components (measured at the University of Leicester) is approximately 0.40 at both C Kalpha and Si Kalpha (E equals 1739 eV). We are now in the process of measuring the absolute QE of both the HRC-I and HRC-S flight detectors at 22 different energies at 4 azimuthal and 5 polar angles. A summary of planned measurements is presented. In addition, we present data taken at the Daresbury Synchrotron Radiation Source to map out the detailed edge structure of the MCP glass and coatings. In particular, we present measurements of the relative QE of CsI coated MCPs around Cs and I M edges, and absolute measurements around the K K and Cs LIII edges. The absolute measurements of the flight instrument at the 22 discrete energies will be combined with the relative synchrotron measurements of flight-like detectors to produce the absolute QE of the HRC over the entire AXAF bandpass (0.1 to 10 keV).
Soft X-ray collimators , based on established microchannel plate technology1,2, are being developed in order to collimate the expanding beam from a laser-plasma X-ray source3. The collimation results in a parallel beam suitable for X-ray lithography of semiconductor devices such as the 1Gbit DRAM (Fig. 1).
Soft x-ray optics based on slumped, profiled microchannel plates (MCPs) are under development. Their purpose is to collimate the expanding beam from a laser-plasma x-ray source, resulting in a parallel beam suitable for lithography of semiconductor devices. We present a prototype design for such an optic with a radius of curvature optimized for maximum beam intensity. The plate thickness (and hence the channel length) is varied as a function of distance from the plate center. The resulting plate profile is determined by the radius of curvature but not by the x- ray energy. This design is shown by Monte Carlo ray-trace modeling to give a circular illuminated field with a diameter of 36mm for 1 keV x-rays. The calculated intensity of the beam is equivalent to that of the divergence beam at a distance of 0.35m from the source. We also present preliminary x-ray measurements from the optic. These optics, while designed with the semiconductor industry in mind, may find application in any field where a uniform or parallel soft x-ray or VUV beam is required.
We describe the use of microchannel plate (MCP) optics to focus soft x-rays produced by the Rutherford Appleton Laboratory (RAL) high brightness plasma source. In this source the x- ray emitting plasma is generated by a high repetition rate, picosecond pulsed excimer laser system. A low cost, low debris, high intensity soft x-ray 'beamline' results from the combination of this bright, point-like, plasma source with a planar square-pore MCP optic. Fluxes of 9 X 109 photon/mm2/s at 33.7 angstrom wavelength and 4 X 107 photon/mm2/s at 7.8 angstrom wavelength have been recorded at the MCP focus. This paper also describes the exploitation of the RAL source for the characterization of prototype MCP optics. Investigations into both planar MCPs with square pores and spherically 'slumped' MCPs with circular pores are reported. The small (10 micrometers diameter) size of the plasma source coupled with an ability to make absolute flux measurements greatly facilitates the calibration process.
The high resolution camera (HRC) will be one of the two focal plane instruments on the Advanced X-ray Astrophysics Facility (AXAF). AXAF is a major NASA space observatory and is scheduled for launch in 1998. The essential elements of the HRC instruments are chevron pairs of microchannel plates (MCPs). The HRC MCPs provide x ray conversion and electron multiplication while maintaining high spatial and temporal resolution. In addition, the HRC MCPs will be the largest format, the lowest internal background, and the highest resolution of any MCP-based x-ray imaging detector. This paper presents results obtained in testing and evaluating flight candidate MCPs with emphasis on their low internal background out-of-band (high energy) response and their spatial uniformity.
We report on the results of a synchrotron calibration of two identical microchannel plate (MCP) detectors carried out at the CCL Daresbury synchrotron radiation source (SRS). The SRS was run with low ring current to allow operation of the detectors in photon-counting mode. Both detectors were half coated with KBr and half with CsI. Detector 1 was calibrated, for both photocathodes, in 1 eV steps over the energy range 50 - 350 eV, on SRS beamline 6.1. We present measurements of edge-related absolute quantum efficiency features arising from both the photocathodes and the underlying lead silicate glass. We also describe the results of charge abstraction lifetests of Detector 1, made possible by the small cross section and relatively high peak count rate of the line 6.1 x-ray beam. A preliminary analysis of the calibration of detector 2 in 3 eV steps over the energy range 2000 - 6000 eV (on IRC beamline 4.2) is also presented.
Focused x-ray images are reported for 21 X 21mm2 microchannel plate (MCP) optics having an eleven micron square-channel geometry. These are the smallest channel size square-pore MCPs yet evaluated. Because the limiting focal spot size in such optics is twice the channel width, their construction represents a significant advance towards focusing elements capable of very high intensification. The MCPs were fabricated with channel length- to-diameter ratios of 40 to 1 and 75 to 1; with an open area fraction of 85%. X-ray images were first obtained at 0.28keV and 1.74keV using a planar MCP geometry with a zero degree bias angle. These images indicate that subtle deviations from an ideal square channel geometry (i.e. vertex 'radiusing') can strongly influence the focal spot structure. Finally, one of the MCPs was spherically 'slumped' to a 1m radius and remeasured in x-rays, demonstrating for the first time the operation of a slumped square-channel MCP.
In the present paper, we describe X-ray images obtained using planar, square pore MCPs in `point-to-point' focusing mode. Angular resolution of 5 arcminutes fwhm has now been measured for full-field illumination of a hydrogen-reduced Galileo MCP (29 mm active diameter; approximately 44,000 active channels). Secondly, we report some preliminary metrology of square-pore microchannel plates using atomic force, scanning electron and optical microscopies. Finally, we extend our study of spherically-slumped, round-pore Philips MCPs operated as X-ray `beam expanders'.
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