Dr. Alexander Lash Profile

Dr. Alexander Lash

at Institute of Spectroscopy RAS

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Publications (2)

Proceedings Article | 28 September 2021 Poster + Presentation

TEUS: high-brightness EUV LPP light source based on fast rotating target: product overview and specifications

Mikhail Krivokorytov, Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Vladimir Ivanov, Vladimir Krivtsun, Alexander Lash, Vyacheslav Medvedev, Vladimir Gubarev, Denis Glushkov, Samir Ellwi, Eugene Gorsky, Alexey Kiselev

Proceedings Volume 11854, 118541A (2021) https://doi.org/10.1117/12.2601008

KEYWORDS: Extreme ultraviolet, Light sources, Statistical analysis, Plasma, Metals, Magnetism, Ions, Silicon, Scanning electron microscopy, Pulsed laser operation

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Proceedings Article | 3 October 2018 Paper

Debris-free high-brightness light source based on LPP for actinic EUV microscopy and metrology applications

Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Alexey Yakushkin, Dimitri Abramenko, Alexander Lash, Mikhail Krivokorytov, Yuri Sidelnikov, Vladimir Ivanov, Vladimir Krivtsun, Vyacheslav Medvedev, Denis Glushkov, Pavel Seroglazov, Samir Ellwi, Rainer Lebert

Proceedings Volume 10809, 108091Q (2018) https://doi.org/10.1117/12.2501812

KEYWORDS: Lithium, Extreme ultraviolet, Tin, Pulsed laser operation, Metrology, Extreme ultraviolet lithography, Super resolution microscopy, Scanners, Light sources, Liquids

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