This paper reports results on electrical characteristics, evaluation of design, and reliability of the first commercially available micromachined relays. The parts have been characterized in a wide range of temperatures (from 100 degrees C to +180 degrees C) and load conditions (voltages from 10 V to 70 V and currents from 5 mA to 200 mA). Mechanical integrity of the parts has been evaluated by subjecting them to multiple mechanical shocks in the range from 100 G to 1000 G up to 10,000 shocks. Life testing was performed at different contact voltages and current loads during 108 switching cycles. To simulate space operation conditions, characteristics of the parts were monitored during vacuum testing. Typical failure modes associated with different test conditions are discussed.
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