Mr. Alexey V. Shaporin Profile

Alexey V. Shaporin

at Fraunhofer-ENAS

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 12 March 2024 Presentation + Paper

Aluminum-nitride-based modular photonic integrated circuit technology and characterization platform (PIC-TCP)

F. Tank, J. Wecker, C. Stöckel, C. Helke, S. Schermer, A. Shaporin, K. Hiller, D. Reuter

Proceedings Volume 12889, 128890B (2024) https://doi.org/10.1117/12.3000807

KEYWORDS: Etching, Aluminum nitride, Photonic integrated circuits, Silicon, Semiconducting wafers, Waveguides, Laser resonators, Dry etching, Cladding, Wafer level optics

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SPIE Journal Paper | 12 December 2022

Design and characterization of a pyroelectric detector based on three-dimensional structured hafnium oxide thin films

Robin Lehmkau, Doris Mutschall, Alena Kaiser, Martin Ebermann, Nobert Neumann, Malte Czernohorsky, Markus Neuber, Karla Hiller, Jan Seiler, Toni Großmann, Alexey Shaporin, Jens Lienig

OE, Vol. 61, Issue 12, 127102, (December 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.12.127102

KEYWORDS: Sensors, Hafnium oxide, Silicon, Capacitance, Pyroelectric detectors, Design and modelling, Optical amplifiers, Signal to noise ratio, Analog electronics, Semiconducting wafers

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Proceedings Article | 9 February 2009 Paper

Novel test structures for characterization of microsystems parameters at wafer level

Alexey Shaporin, Petra Streit, Hendrik Specht, Jan Mehner, Wolfram Dötzel

Proceedings Volume 7206, 72060E (2009) https://doi.org/10.1117/12.810051

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Microsystems, Silicon, Manufacturing, Doppler effect, Finite element methods, Data modeling, Genetic algorithms, Deep reactive ion etching

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Proceedings Article | 18 February 2008 Paper

Reliability of MEMS devices in shock and vibration overload situations

Steffen Kurth, Alexey Shaporin, Karla Hiller, Christian Kaufmann, Thomas Gessner

Proceedings Volume 6884, 688409 (2008) https://doi.org/10.1117/12.763617

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Cell phones, Velocity measurements, Interferometers, Finite element methods, Reliability, Aluminum, Doppler effect

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Proceedings Article | 22 January 2005 Paper

Novel characterization method for MEMS devices

Alexey Shaporin, Marian Hanf, Wolfram Doetzel

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.590305

KEYWORDS: Mirrors, Micromirrors, Microelectromechanical systems, Finite element methods, Interferometers, Doppler effect, Signal analyzers, Manufacturing, Numerical simulations, Semiconducting wafers

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Proceedings Article | 22 January 2005 Paper

Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulator

Marian Hanf, Alexey Schaporin, Ramon Hahn, Wolfram Doetzel, Thomas Gessner

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.590335

KEYWORDS: Mirrors, Micromirrors, Sensors, Spectroscopy, Semiconducting wafers, Optical filters, Computer programming, Signal to noise ratio, Signal detection, Electrodes

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Showing 5 of 6 publications

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