Dr. Alexey Yakushkin Profile

Dr. Alexey Yakushkin

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Publications (1)

Proceedings Article | 3 October 2018 Paper

Debris-free high-brightness light source based on LPP for actinic EUV microscopy and metrology applications

Konstantin Koshelev, Alexander Vinokhodov, Oleg Yakushev, Alexey Yakushkin, Dimitri Abramenko, Alexander Lash, Mikhail Krivokorytov, Yuri Sidelnikov, Vladimir Ivanov, Vladimir Krivtsun, Vyacheslav Medvedev, Denis Glushkov, Pavel Seroglazov, Samir Ellwi, Rainer Lebert

Proceedings Volume 10809, 108091Q (2018) https://doi.org/10.1117/12.2501812

KEYWORDS: Lithium, Extreme ultraviolet, Tin, Pulsed laser operation, Metrology, Extreme ultraviolet lithography, Super resolution microscopy, Scanners, Light sources, Liquids

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